Imprint master template and method of manufacturing the same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11376800
APP PUB NO 20200361160A1
SERIAL NO

16983326

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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An imprint master template including a first fine pattern unit having an upper surface on which a fine pattern is formed, a second fine pattern unit disposed adjacent to the first fine pattern unit and having an upper surface on which a fine pattern is formed, and a supporting part configured to support the first fine pattern unit and the second fine pattern unit. A side surface of the first fine pattern unit faces a side surface of the second fine pattern unit. The side surface of the first fine pattern unit includes a first surface which is perpendicular to the upper surface and a second surface which is inclined at a predetermined angle with respect to the first surface. The side surface of the second fine pattern unit includes a first surface which is perpendicular to the upper surface and a second surface which is inclined at a predetermined angle with respect to the first surface.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG DISPLAY CO LTDGYEONGGI-DO 17113

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
An, Moonjung Hwaseong-si, KR 6 33
Cho, Hyungbin Seongnam-si, KR 15 32
Han, Kang Soo Seoul, KR 21 29
Jo, Gugrae Asan-si, KR 23 117

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