Metal ion source emitting device

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11373837
APP PUB NO 20210343495A1
SERIAL NO

16928529

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Abstract

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The disclosure provides a metal ion source emitting device comprising a ceramic chamber, a leading-out electrode chamber and three cathodes hermetically connected, a trigger electrode fixed on a ceramic insulating element, a cathode target material fixed on an indirect cooling channel, a limiting element fixed on a fixed element, the fixed element fixing the indirect cooling channel on a cathode cooling pipe, the cathode cooling pipe fixed on a cathode flange, a trigger binding post connected with the trigger electrode, a leading-out electrode and an accelerating electrode arranged right below a cathode in the leading-out electrode chamber, and leading-out slits formed on the accelerating electrode and the leading-out electrode. According to the emitting device, three cathodes can operate simultaneously with only one anode, increasing irradiation area of an ion source, and improving the operating efficiency and energy utilization rate, with a more compact emitting source and larger processing area.

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Patent Owner(s)

Patent OwnerAddress
BEIJING NORMAL UNIVERSITY100875 19 XINJIE STREET HAIDIAN DISTRICT BEIJING BEIJING CITY BEIJING CITY 100875
GUANGDONG GUANGXIN ION BEAM TECHNOLOGY CO LTD510663 101 BUILDING C PEPSICO SMART PARK 179 PUPU EAST ROAD HUANGPU DISTRICT GUANGZHOU CITY GUANGDONG PROVINCE GUANGZHOU CITY GUANGDONG PROVINCE 510663

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Lin Beijing, CN 717 4332
Liao, Bin Beijing, CN 20 181
Luo, Jun Beijing, CN 335 1637
Ouyang, Xiao Beijing, CN 10 9
Ouyang, Xiaoping Beijing, CN 11 7
Pang, Pan Beijing, CN 4 0
Wang, Guoliang Beijing, CN 19 86
Wu, Xianying Beijing, CN 6 2
Ying, Minju Beijing, CN 4 0
Zhang, Xu Beijing, CN 514 2234

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