High-resolution scanning microscopy

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United States of America

PATENT NO 11372223
APP PUB NO 20190258042A1
SERIAL NO

16357869

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Abstract

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A microscope and method for high resolution scanning microscopy of a sample, having an illumination device, an imaging device for the purpose of scanning at least one point or linear spot across the sample and of imaging the point or linear spot into a diffraction-limited, static single image below a reproduction scale in a detection plane. A detector device is used for detecting the single image in the detection plane for various scan positions, with a location accuracy which, taking into account the reproduction scale in at least one dimension/measurement, is at least twice as high as a full width at half maximum of the diffraction-limited single image.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS MICROSCOPY GMBH07745 JENA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kleppe, Ingo Jena, DE 56 485
Netz, Ralf Jena, DE 47 346
Nieten, Christoph Jena, DE 31 235
Novikau, Yauheni Jena, DE 32 205

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