Mask structure and manufacturing method thereof

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United States of America Patent

PATENT NO 11366381
APP PUB NO 20190250502A1
SERIAL NO

16395244

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Abstract

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A mask structure and a manufacturing method of the mask structure are provided. The mask structure includes a transparent substrate, a patterned metal layer, and a plurality of microlens structures. The patterned metal layer is disposed on the transparent substrate and exposing a portion of the transparent substrate. The microlens structures are disposed on the transparent substrate exposed by a portion of the patterned metal layer and being in contact with the portion of the patterned metal layer.

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Patent Owner(s)

Patent OwnerAddress
UNIMICRON TECHNOLOGY CORPNO 179 SHANYING RD GUISHAN DIST TAOYUAN CITY 333

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Yu-Hua Hsinchu, TW 80 525
Cheng, Shih-Lian New Taipei, TW 32 58
Chien, Jui-Jung Hsinchu County, TW 3 0
Ho, Wei-Tse Taichung, TW 2 0
Ko, Cheng-Ta Taipei, TW 78 166
Lin, Pu-Ju Hsinchu, TW 51 13

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