Detecting backscattered electrons in a multibeam charged particle column

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United States of America Patent

PATENT NO 11366072
APP PUB NO 20210341398A1
SERIAL NO

16866329

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Abstract

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A method and a system for detecting backscattered electrons in a multi-beam electron column.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS ISRAEL LTDTHE CITY OF ISRAEL HARVARD REHOVOT CENTRAL DISTRICT

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Levin, Jacob Rehovot, IL 10 33
Litman, Alon Nes-Ziona, IL 33 340

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