System and method for generating and analyzing roughness measurements and their use for process monitoring and control
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United States of America Patent
Stats
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Jun 7, 2022
Grant Date -
May 13, 2021
app pub date -
Nov 13, 2020
filing date -
Apr 13, 2017
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An edge detection system is disclosed. The edge detection system includes an imaging device configured for imaging a pattern structure to form a first image, wherein the pattern structure includes a predetermined feature, and the imaging device images the pattern structure to generate measured linescan information that includes image noise. The edge detection system includes a processor, coupled to the imaging device, configured to receive the measured linescan information including image noise from the imaging device, wherein the processor is configured to: apply the measured linescan information to an inverse linescan model that relates the measured linescan information to feature geometry information, determine, from the inverse linescan model, feature geometry information that describes feature edge positions of the predetermined feature corresponding to the measured linescan information, determine from the feature geometry information at least one metric that describes a property of the edge detection system.
First Claim
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International Classification(s)
- 2020 Application Filing Year
- H01J Class
- 2540 Applications Filed
- 1680 Patents Issued To-Date
- 66.15 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 1 Citation Count
- H01J Class
- 70.94 % this patent is cited more than
- 3 Age
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