X-ray detectors capable of limiting diffusion of charge carriers
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United States of America Patent
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Jun 7, 2022
Grant Date -
Jan 21, 2021
app pub date -
Sep 30, 2020
filing date -
Oct 14, 2015
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Abstract
A method of making an apparatus suitable for detecting X-ray is disclosed. In an example, the method includes: obtaining a semiconductor substrate with a first electrical contact on a first surface and a second electrical contact on a second surface opposite the first surface, the second electrical contact comprising a plurality of discrete portions; forming a plurality of trenches extending into at least 70% of a thickness of the semiconductor substrate, wherein the plurality of trenches encircle each of the discrete portions.
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