Apparatus for tuning discharge performance in a laser chamber

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United States of America Patent

PATENT NO 11349273
APP PUB NO 20210066880A1
SERIAL NO

16962434

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Abstract

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Disclosed is a laser discharge chamber in which useful lifetime is extended by local electrical tuning using one or a combination of design of the chamber internal geometry, placement and distribution of components within the chamber such as electrodes, current returns, and capacitors, and selective electrical isolation of portions of the components.

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Patent Owner(s)

Patent OwnerAddress
CYMER LLC17075 THORNMINT COURT SAN DIEGO CA 92127

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Luo, Edward Siqi San Diego, US 6 1
Ujazdowski, Richard Carl Ramona, US 4 8
Xu, Shuang San Diego, US 62 300

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