Laser chamber, method for manufacturing seal member, and method for manufacturing electronic device
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United States of America Patent
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May 31, 2022
Grant Date -
Dec 24, 2020
app pub date -
Aug 31, 2020
filing date -
Apr 23, 2018
priority date (Note) -
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Abstract
A laser chamber of an excimer laser apparatus includes a container including a first member and a second member and configured to accommodate a laser gas in the container and a seal member disposed between two seal surfaces facing each other, a seal surface of the first member and a seal surface of the second member. A laser-gas-side surface of the seal member is made of fluorine-based rubber, and an atmosphere-side surface of the seal member is formed of a film configured to suppress atmosphere transmission.
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