Thermal chamber exhaust structure and method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11348811
APP PUB NO 20190348309A1
SERIAL NO

16519504

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Abstract

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An exhaust structure includes an intake section which includes an inlet, an output section which includes an outlet, and a piping section coupled to the intake section and the output section at a section interface. The piping section includes a first inner diameter from the intake section to the output section, wherein one of the intake section or the output section has a second inner diameter at the section interface. The second inner diameter includes a same value as a value of the first inner diameter. A plurality of smoothing layers are configured to resist turbulence and condensation produced by a flow of one or more gasses in the intake section, the output section, and the piping section.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hsieh, Hsien-Chang Hsinchu, TW 5 12
Lin, Chun-Chih Taipei, TW 55 80
Shih, Tah-Te Hsinchu, TW 11 27
Su, Yu-Jen Hsinchu, TW 19 72
Wu, Wen-Hsong Hsinchu, TW 4 0
Yang, Chune-Te Erlin Township, TW 4 6

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