Quasi-single-crystal film and manufacturing method thereof

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United States of America Patent

PATENT NO 11346019
APP PUB NO 20210032774A1
SERIAL NO

16939566

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Abstract

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A quasi-single-crystal film and its manufacturing method thereof are provided, in which a metal film having a preferred orientation of <111> on its surface is subjected to a mechanical stretching force, such that the crystal grains thereof are able to form in a much more orderly arrangement, and a quasi-single-crystal film having preferred orientations on three axes can be obtained. The proposed quasi-single-crystal film has preferred orientations of <211> and <110> on its stretching direction and a direction that is perpendicular to the stretching direction, respectively, and retains a preferred orientation of <111> on its surface. By employing the present invention, it is advantageous of manufacturing large-area quasi single crystal films having high anisotropy as well as growing two dimensional materials or developing of other anisotropic feature structures.

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Patent Owner(s)

Patent OwnerAddress
NATIONAL CHIAO TUNG UNIVERSITYNO 1001 DASYUE RD HSINCHU CITY 300

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Chih Hsinchu, TW 38 207
Li, Yu-Jin Hsinchu, TW 4 0

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