Production method of template, template blank, and template substrate for imprinting, production method of template for imprinting, and template
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United States of America Patent
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May 24, 2022
Grant Date -
Mar 21, 2019
app pub date -
May 24, 2017
filing date -
May 25, 2016
priority date (Note) -
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Abstract
A template and a template blank are used for imprint lithography transferring a transfer pattern in a concave and convex structure to a resin on a transfer substrate, in which a first step structure is formed on a main surface of a base, a second step structure is formed on the first step structure, and an outside region of the second step structure on an upper surface of the first step structure is covered with a light shielding film to solve the above problem.
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