Light guide assembly for an electron microscope

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United States of America Patent

PATENT NO 11335536
APP PUB NO 20210082659A1
SERIAL NO

17011378

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Abstract

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An embodiment of electron microscope system is described that comprises an electron column pole piece and a light guide assembly operatively coupled together. The light guide assembly also includes one or more detectors, and a mirror with a pressure limiting aperture through which an electron beam from an electron source passes. The mirror is also configured to reflect light, as well as to collect back scattered electrons and secondary electrons.

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Patent Owner(s)

Patent OwnerAddress
FEI COMPANY5350 NE DAWSON CREEK DRIVE HILLSBORO OR 97124

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Geryk, Michal Brno, CZ 4 8
Lasko, Jan Chocen, CZ 2 2
Uncovsky, Marek Brno, CZ 8 71

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