Two-stage ion source comprising closed and open ion volumes

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11328919
APP PUB NO 20210233760A1
SERIAL NO

17053557

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Abstract

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An ion source includes a base, a first chamber, a second chamber and an extractor. The first chamber is disposed downstream of the base and defines a first internal volume having a first pressure. The second chamber is disposed downstream of the first chamber and defines a second internal volume having a second pressure. The second pressure is less than the first pressure. The repeller electrode is disposed within the first chamber. The extractor is disposed downstream of the second chamber.

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Patent Owner(s)

Patent OwnerAddress
LECO CORPORATION3000 LAKEVIEW AVENUE ST JOSEPH MI 49085

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Artaev, Viatcheslav St. Joseph, US 7 40
Tikhonov, Georgy Y St. Joseph, US 1 1

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