Oxide sintered body and sputtering target

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United States of America

PATENT NO 11328911
APP PUB NO 20190218145A1
SERIAL NO

16310388

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Abstract

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An oxide sintered body includes a bixbyite phase represented by In2O3, and a garnet phase represented by Y3In2Ga3O12.

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Patent Owner(s)

  • IDEMITSU KOSAN CO. LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Inoue, Kazuyoshi Sodegaura, JP 118 4436
Shibata, Masatoshi Sodegaura, JP 45 291
Takeshima, Motohiro Sodegaura, JP 16 104
Tomai, Shigekazu Sodegaura, JP 57 1357

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