Protecting an interior of a gas container with an ALD coating

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11326254
APP PUB NO 20160369396A1
SERIAL NO

15123052

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Abstract

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An apparatus and method for protecting a gas container interior, where an inlet and exhaust manifold include a port assembly attachable to a port of the gas container is provided, the gas container interior is exposed to sequential self-saturating surface reactions by sequential inlet of reactive gases via the port assembly and the port into the gas container interior, and reaction residue is pumped via the port and the port assembly out from the gas container.

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Patent Owner(s)

Patent OwnerAddress
PICOSUN OYTIETOTIE 3 02150 ESPOO 02150

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aarik, Jaan Tartu, EE 2 7
Aarik, Lauri Tartu, EE 4 18
Adam, Peter Munich, DE 47 1165
Bayerl, Willi Sauerlach, DE 2 6
Kostamo, Juhana Espoo, FI 33 3783
Lindfors, Sven Espoo, FI 41 8463
Poutiainen, Juho Helsinki, FI 1 6
Sammelselg, Väino Tartu, EE 2 7

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