Target supply device, target supply method, and electronic device manufacturing method
Number of patents in Portfolio can not be more than 2000
United States of America
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May 3, 2022
Grant Date -
Nov 25, 2021
app pub date -
Apr 12, 2021
filing date -
Apr 12, 2021
priority date (Note) -
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status (Latency Note)
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Abstract
A target supply device may include a first container configured to contain a target substance, a second container configured to contain the target substance supplied from the first container, a first valve disposed between the first container and the second container, a first pipe connected to the second container and configured to supply pressurized gas to the second container, a third container configured to contain the target substance supplied from the second container, a second valve disposed between the second container and the third container, a second pipe connected to the third container and configured to supply pressurized gas to the third container, and a nozzle configured to output the target substance supplied from the third container.
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