Alignment mark, substrate and manufacturing method therefor, and exposure alignment method
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
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Apr 26, 2022
Grant Date -
Jun 25, 2020
app pub date -
Sep 7, 2018
filing date -
Sep 7, 2018
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An alignment mark includes an alignment region, a peripheral region and a shielding region. The alignment region has an outer contour; the peripheral region is disposed around at least a part of the outer contour of the alignment region; the shielding region is disposed around at least a part of the outer contour of the alignment region and is non-overlapped with the peripheral region; and the alignment region and the shielding region are opaque, and the peripheral region is at least partially transparent.
First Claim
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International Classification(s)
- 2018 Application Filing Year
- H01L Class
- 30734 Applications Filed
- 24554 Patents Issued To-Date
- 79.90 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H01L Class
- 0 % this patent is cited more than
- 3 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Oct 26, 2025 |
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Oct 26, 2029 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Oct 26, 2033 |