System apparatus and method for enhancing electrical clamping of substrates using photo-illumination

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United States of America

PATENT NO 11315819
APP PUB NO 20210366756A1
SERIAL NO

16880540

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Abstract

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A method may include providing a substrate on a clamp, and directing radiation from an illumination source to the substrate when the substrate is disposed on the clamp during substrate processing, wherein the radiation is characterized by a radiation energy, wherein at least a portion of the radiation energy is equal to or greater than 2.5 eV.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Anella, Steven M West Newbury, US 18 45
Blake, Julian G Gloucester, US 61 1059
Chen, Qin Santa Clara, US 78 509
Fischer, Jonathan D Lynn, US 6 15
Osborne, Michael W Clinton, US 23 257

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