Microdevice comprising at least two movable elements

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11312618
APP PUB NO 20210130158A1
SERIAL NO

16492345

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A microdevice (100) comprising a movable element (111) capable of moving relative to a fixed part (115), produced in first and second layers of material (104, 106) arranged one above the other such that the movable element comprises a portion (112) of the first layer and a portion (118) of the second layer secured to each other, and wherein the movable element is suspended from the fixed part by a suspension structure (121) formed in the first and/or second layer of material.

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Patent Owner(s)

Patent OwnerAddress
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESFRANCE PARIS PARIS
SAFRANPARIS FRANCE PARIS PARIS

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Berthelot, Audrey Saint-Ismier, FR 12 67
Colin, Mikaël Grenoble, FR 2 3
Jeanroy, Alain Moissy-Cramayel, FR 16 85
Lehee, Guillaume Moissy-Cramayel, FR 14 21
Mace, Jean-Sébastien Moissy-Cramayel, FR 1 0
Onfroy, Philippe Moissy-Cramayel, FR 8 11
Vancauwenberghe, Olivier Moissy-Cramayel, FR 6 157

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