Prevention of dripping of material for material injection

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11298769
APP PUB NO 20200361013A1
SERIAL NO

16410651

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Importance

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Abstract

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An injection apparatus for injection material is disclosed. The injection apparatus includes a tank for storing material. The injection apparatus further includes a head body that has a surface for contacting a substrate and an opening part opened at the surface for discharging the material in fluid-communication with the tank. The injection apparatus further includes a member connected to the opening part, in which the member allows gas to flow into and flow out from the opening part.

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Patent Owner(s)

Patent OwnerAddress
INTERNATIONAL BUSINESS MACHINES CORPORATIONNEW ORCHARD ROAD ARMONK NY 10504

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aoki, Toyohiro Kanagawa, JP 51 114
Hisada, Takashi Tokyo, JP 55 177
Nakamura, Eiji Kanagawa, JP 114 1003

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