Method for producing ozone water
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United States of America
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Apr 5, 2022
Grant Date -
Jun 3, 2021
app pub date -
Apr 26, 2019
filing date -
Apr 26, 2019
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Conventional ozone water is still insufficient in the removal rate and cleaning ability of resist required in today's semiconductor manufacturing field, and it does not fully meet the expectation of further improvement in the effects of sterilization, deodorization, and cleaning in the fields such as cleaning of foodstuffs, cleaning of process equipment and tools, and cleaning of fingers, as well as in the fields such as deodorization, sterilization, and preservation of freshness of foodstuffs. The above problem can be solved by defining the values of a plurality of specific production parameters in the production of ozone water into specific ranges.
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International Classification(s)
- H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
- B08B:CLEANING IN GENERAL; PREVENTION OF FOULING IN GENE....
- B01F:MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING
- G03F:PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNE....
- C11D:DETERGENT COMPOSITIONS
- C02F:TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE....
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