Method and apparatus for carrying out a time-resolved interferometric measurement

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United States of America

PATENT NO 11293747
APP PUB NO 20200103213A1
SERIAL NO

16493610

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Abstract

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An embodiment of the invention relates to a method for carrying out a time-resolved interferometric measurement comprising the steps of generating at least two coherent waves, overlapping said at least two coherent waves and producing an interference pattern, measuring the interference pattern for a given exposure time, thereby forming measured interference values, and analyzing the measured interference values and extracting amplitude and/or phase information from the measured interference values. In at least one time segment, hereinafter referred to as disturbed time segment, of the expo-sure time, the interference pattern is intentionally disturbed or destroyed such that the corresponding measured interference values describe a disturbed or destroyed interference pattern. In at least one other time segment, hereinafter referred to as undisturbed time segment, of the exposure time, the interference pattern is undisturbed or at least less disturbed compared to the disturbed time segment such that the corresponding measured interference values describe an undisturbed or less disturbed interference pattern. The measured interference values that were measured during the entire given exposure time, are filtered, wherein those interference values that were measured during the at least one disturbed time segment, are reduced, suppressed or discarded. The filtered interference values are analyzed and the amplitude and/or phase information is extracted from the filtered interference values.

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Patent Owner(s)

Patent OwnerAddress
TECHNISCHE UNIVERSITAET BERLINSTRASSE DES 17 JUNI 135 BERLIN 10623

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lehmann, Michael Berlin, DE 60 1036
Niermann, Tore Berlin, DE 2 0
Wagner, Tolga Berlin, DE 3 0

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