Control system and method

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11287743
APP PUB NO 20200401050A1
SERIAL NO

16977667

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Abstract

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A control system for controlling a laser, comprising a sensor for sensing a physical value indicative of a characteristic of a laser beam emitted by the laser, a switch, a first controller and a second controller. Each controller is configured, to receive a further sensor value from the sensor, adjust a received setpoint value based on the received further sensor value to give an output value and cause the laser to operate in accordance with the output value. The switch is configured to switch between the controllers such that output values are provided from each controller in a cyclic fashion.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Everts, Frank Eindhoven, NL 22 270
Godfried, Herman Philip Amsterdam, NL 32 176
Op, 'T Root Wilhelmus Patrick Elisabeth Maria Nederweert, NL 15 20

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