Compensating for an electromagnetic interference induced deviation of an electron beam

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11276545
SERIAL NO

17131666

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A method, a non-transitory computer readable medium and a system for compensating for an electromagnetic interference induced deviation of an electron beam. The method may include obtaining measurement information about a magnetic field within an electron beam tool, the measurement information is generated by at least one planar Hall Effect magnetic sensor that is located within the electron beam tool; wherein the at least one planar Hall Effect magnetic sensor comprises at least one magnetometer integrated with at least one magnetic flux concentrator; estimating the electromagnetic interference induced deviation of the electron beam, the estimating is based on the magnetic field; and setting a trajectory of the electron beam to compensate for the electromagnetic interference induced deviation of the electron beam.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS ISRAEL LTDTHE CITY OF ISRAEL HARVARD REHOVOT CENTRAL DISTRICT
BAR ILAN UNIVERSITYRAMAT GAN
B G NEGEV TECHNOLOGIES AND APPLICATIONS LTD AT BEN-GURION UNIVERSITYBEER SHEVA

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Basson, Yosef Mazkeret-Batya, IL 7 25
Belenky, Yuri Be'er-Ya'akov, IL 7 54
Grosz, Asaf Ramat-Gan, IL 4 4
Klein, Lior Ramat-Gan, IL 6 30
Rozen, Mordechai Rishon-LeZion, IL 2 1

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Sep 15, 2025
7.5 Year Payment $3600.00 $1800.00 $900.00 Sep 15, 2029
11.5 Year Payment $7400.00 $3700.00 $1850.00 Sep 15, 2033
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00