Systems and methods for photolithographic design
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United States of America
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Mar 15, 2022
Grant Date -
Dec 10, 2020
app pub date -
Aug 26, 2020
filing date -
Aug 26, 2020
priority date (Note) -
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Abstract
A method of identifying elements in a design layout having multiple levels of hierarchical cells, each cell having one or more geometric elements, may include selecting a cell from a list of candidate cells for a level of a hierarchy; applying a local rule to the selected cell; identifying each selected cell that includes a geometric element that passes the local rule; building a list of candidate cells for a next-higher level of the hierarchy according to the identified cells; repeating the selecting, identifying, and building operations for each higher level of the hierarchy; and when a highest level of the hierarchy has been processed, returning and storing the list of candidate cells as the global solution for the applied local rule.
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