Liquid ejecting head and liquid ejecting apparatus
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United States of America
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Mar 15, 2022
Grant Date -
Oct 22, 2020
app pub date -
Apr 15, 2020
filing date -
Apr 15, 2020
priority date (Note) -
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Abstract
A liquid ejecting head including a diaphragm constituting a portion of a wall surface of a pressure chamber that accommodates a liquid, and a piezoelectric element that vibrates the diaphragm. In the liquid ejecting head, the diaphragm includes a plurality of layers, and the plurality of layers include a compressive film that has compressive stress and a tensile film that has tensile stress. The compressive film and the tensile film are two layers adjacent to each other that have a largest tension difference among the plurality of layers, and an absolute value of the tension difference between the compressive film and the tensile film is 400 [N/m] or smaller.
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