Frame assembly, lithographic apparatus and device manufacturing method

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11269262
APP PUB NO 20210240090A1
SERIAL NO

17049719

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A lithographic apparatus or frame assembly, comprising: a first and second pneumatic support, being arranged to control position of a frame, each of said pneumatic supports accommodating a pressure chamber; a frame position control system, comprising; a first position sensor device, configured to generate measurement data relating to the position of the frame; a first pressure controller, configured to control the pressure in the pressure chamber of the first pneumatic support on the basis of the measurement data generated by the first position sensor device; a pressure differential sensor device, configured to generate data relating to the difference between the pressure in the pressure chambers of the first and the second pneumatic support; a second pressure controller, configured to control the pressure in the pressure chamber of the second pneumatic support on the basis of the measurement data from the pressure differential sensor device.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VDE RUN 6501 VELDHOVEN NL - 5504 DR

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Butler, Hans Best, NL 166 2708
De, Beer Joep Sander Oss, NL 2 0
De, Hoon Cornelius Adrianus Lambertus Eindhoven, NL 22 109
Starreveld, Jeroen Pieter Knegsel, NL 14 88
Van, Duijnhoven Martinus Deurne, NL 12 46
Wijckmans, Maurice Willem Jozef Etiënne Eindhoven, NL 17 62

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