Capacitive micromachined ultrasonic transducer and ultrasonic imaging apparatus using the same

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United States of America

PATENT NO 11268937
APP PUB NO 20190170699A1
SERIAL NO

16315676

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A capacitive micromachined ultrasonic transducer 111A includes: a silicon substrate 101; an insulating film 102 formed over the silicon substrate 101; a lower electrode 103; insulating films 104 and 106; a cavity 105 constituted by a void formed in a portion of the insulating film 106; an upper electrode 107; insulating films 108 and 114; and a protective film 109. In addition, the insulating film 106, upper electrode 107, insulating film 108 and insulating film 114 above the cavity 105 configure a vibration film 110, and the protective film 109 above the vibration film 110 is divided into a plurality of isolated patterns regularly arranged with a gap 115 having a constant spacing formed therebetween.

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Patent Owner(s)

Patent OwnerAddress
FUJIFILM CORPORATION26-30 NISHIAZABU 2-CHOME MINATO-KU TOKYO 1068620 ?1068620

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Machida, Shuntaro Tokyo, JP 59 805
Nagata, Tatsuya Tokyo, JP 67 729
Ryuzaki, Daisuke Tokyo, JP 53 347
Takezaki, Taiichi Tokyo, JP 19 59
Yamashita, Naoaki Tokyo, JP 20 90
Yoshimura, Yasuhiro Tokyo, JP 58 874

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