Semiconductor substrate, semiconductor element and method for producing semiconductor substrate

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11264241
APP PUB NO 20200168460A1
SERIAL NO

16630087

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A semiconductor substrate includes a single crystal Ga2O3-based substrate and a polycrystalline substrate that are bonded to each other. A thickness of the single crystal Ga2O3-based substrate is smaller than a thickness of the polycrystalline substrate, and a fracture toughness value of the polycrystalline substrate is higher than a fracture toughness value of the single crystal Ga2O3-based substrate.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
NATIONAL INSTITUTE OF INFORMATION AND COMMUNICATIONS TECHNOLOGY4-2-1 NUKUI-KITAMACHI KOGANEI-SHI TOKYO 1848795
TAMURA CORPORATIONTOKYO JAPAN
SICOXS CORPORATIONTOKYO 1050004

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hatta, Naoki Tokyo, JP 19 172
Higashiwaki, Masataka Tokyo, JP 20 209
Konishi, Keita Tokyo, JP 3 1
Kuramata, Akito Sayama, JP 22 350
Sasaki, Kohei Sayama, JP 52 293
Watanabe, Shinya Sayama, JP 282 1738
Yagi, Kuniaki Tokyo, JP 19 208

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Sep 1, 2025
7.5 Year Payment $3600.00 $1800.00 $900.00 Sep 1, 2029
11.5 Year Payment $7400.00 $3700.00 $1850.00 Sep 1, 2033
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00