Generating three dimensional information regarding structural elements of a specimen

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11264202
APP PUB NO 20210358712A1
SERIAL NO

16876637

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A method, a non-transitory computer readable medium and a three-dimensional evaluation system for providing three dimensional information regarding structural elements of a specimen. The method can include illuminating the structural elements with electron beams of different incidence angles, where the electron beams pass through the structural elements and the structural elements are of nanometric dimensions; detecting forward scattered electrons that are scattered from the structural elements to provide detected forward scattered electrons; and generating the three dimensional information regarding structural elements based at least on the detected forward scattered electrons.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS ISRAEL LTD9 OPPENHEIMER STREET PARK RABIN REHOVOT 7670109

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chirko, Konstantin Rehovot, IL 11 10
Eytan, Guy Kidron, IL 18 68
Karabekov, Albert Ashdod, IL 6 14
Litman, Alon Nes-Ziona, IL 33 340
Shani, Itamar Rehovot, IL 5 3
Yaron, Lior Nes Ziona, IL 5 0

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Sep 1, 2025
7.5 Year Payment $3600.00 $1800.00 $900.00 Sep 1, 2029
11.5 Year Payment $7400.00 $3700.00 $1850.00 Sep 1, 2033
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00