Image sensor, position sensor device, lithography system, and method for operating an image sensor

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United States of America

PATENT NO 11262660
APP PUB NO 20200363731A1
SERIAL NO

16987504

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Abstract

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An image sensor for a position sensor apparatus for ascertaining a position of at least one mirror of a lithography apparatus includes: a plurality of integrated optical waveguides; a plurality of incoupling areas; a multiplexer apparatus; and an image reconstruction apparatus.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS SMT GMBHGERMANY COHEN OBERKOCHEN BADEN-WURTTEMBERG

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bihr, Ulrich Kirchheim/Dirgenheim, DE 13 24
Deguenther, Markus Florstadt, DE 127 1347
Horn, Jan Munich, DE 32 129
Zott, Andy Gerstetten, DE 3 2

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