Method for discharging fluid
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United States of America Patent
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Feb 22, 2022
Grant Date -
May 13, 2021
app pub date -
Jan 21, 2021
filing date -
Dec 15, 2015
priority date (Note) -
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Abstract
In conventional fluid discharge devices, a discharge head used should be increased in size according to increase in size of a workpiece such as silicon wafer. However, if the discharge head increases in length, a deformation amount of a mask used for discharging the fluid on the workpiece increases, thereby the discharging amount varies. Discharging the fluid in a reciprocating manner is performed using a fluid discharging device including a head unit having a width shorter than a length of the workpiece. A suction port having opening portions each having a slit shape are disposed on the both sides of the discharge nozzle in a vicinity of the discharge nozzle.
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