Temperature monitoring apparatus, heat treatment apparatus, and temperature monitoring method

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United States of America Patent

PATENT NO 11257697
APP PUB NO 20190341284A1
SERIAL NO

16396994

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Abstract

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A temperature monitoring apparatus includes: a calculator configured to calculate a temperature monitoring waveform by a first-order lag function based on an elapsed time from a start of a temperature change from a first temperature to a second temperature, and a time constant calculated based on a locus of the temperature change; and a monitor configured to monitor a temperature changing from the first temperature to the second temperature based on the temperature monitoring waveform calculated by the calculator.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITEDTOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kikuchi, Yasuaki Iwate, JP 15 130
Yamaguchi, Tatsuya Iwate, JP 160 3658

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