Clog detection in a multi-port fluid delivery system
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United States of America Patent
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Feb 15, 2022
Grant Date -
May 16, 2019
app pub date -
Oct 29, 2018
filing date -
Nov 13, 2017
priority date (Note) -
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Abstract
Embodiments of the present disclosure provide for apparatus used to detect clogs in a fluid delivery system during CMP processes and methods of detecting clogs in a fluid delivery system during CMP processes. In particular, embodiments herein provide a flow splitter manifold configured to enable monitoring of the pressure of the polishing fluid disposed therein. Monitoring the fluid pressure in the flow splitter manifold enables the detection of clogs in the delivery lines and/or dispense nozzles that inhibit and/or prevent the flow of polishing fluid therethrough or therefrom.
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