Liquid-assisted laser micromachining systems and methods for processing transparent dielectrics and optical fiber components using same

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United States of America Patent

PATENT NO 11247932
APP PUB NO 20190232435A1
SERIAL NO

16257853

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Abstract

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The liquid-assisted micromachining methods include methods of processing a substrate made of a transparent dielectric material. A working surface of the substrate is placed in contact with a liquid-assist medium that comprises fluorine. A focused pulsed laser beam is directed through a first substrate surface and through the opposite working surface to form a focus spot in the liquid-assist medium. The focus spot is then moved over a motion path from its initial position in the liquid-assist medium through the substrate body in the general direction from the working surface to the first surface to create a modification of the transparent dielectric material that defines in the body a core portion. The core portion is removed to form the substrate feature, which can be a through or closed fiber hole that supports one or more optical fibers. Optical components formed using the processed substrate are also disclosed.

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Patent Owner(s)

Patent OwnerAddress
CORNING INCORPORATEDCORNING NY 14831

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
DeMeritt, Jeffery Alan Painted Post, US 23 364
Fortusini, Davide Domenico Painted Post, US 39 348
Kobyakov, Andrey Painted Post, US 29 605
Lance, David Mark Elmira, US 4 1
Masters, Leonard Thomas Painted Post, US 13 55
Neukirch, Ulrich Wilhelm Heinz Painted Post, US 18 116
Streltsov, Alexander Mikhailovich Corning, US 67 1201
Sutherland, James Scott Corning, US 129 1587

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