Substrate processing apparatus, device management controller, and recording medium

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11237538
APP PUB NO 20170285613A1
SERIAL NO

15468906

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Abstract

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A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.

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Patent Owner(s)

Patent OwnerAddress
KOKUSAI ELECTRIC CORPORATION3-4 KANDAKAJI-CHO CHIYODA-KU TOKYO 101-0045

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Asai, Kazuhide Toyama, JP 32 113
Fujimoto, Kenichi Toyama, JP 35 221
Hayashihara, Hidemoto Toyama, JP 10 28
Iwakura, Hiroyuki Toyama, JP 20 115
Kaji, Ryuichi Toyama, JP 13 138
Kawagishi, Takayuki Toyama, JP 8 27
Miyata, Yukio Toyama, JP 23 148
Okuno, Masanori Toyama, JP 14 51
Yamamoto, Kazuyoshi Toyama, JP 57 353
Yashiki, Kayoko Toyama, JP 15 55

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