Wide-field scanning probe microscope combined with an apparatus for modifying an object
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
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Feb 1, 2022
Grant Date -
Jul 18, 2019
app pub date -
May 18, 2017
filing date -
May 18, 2017
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The invention relates to the field of probe measurements of objects after micro- and nano-sectioning. The essence of the invention consists in that in a wide-field scanning probe microscope combined with an apparatus for modifying an object, said microscope comprising a base on which a piezo-scanner unit having a piezo scanner, a probe unit having a probe holder, and a punch unit having a punch are movably mounted, a punch actuator is configured as a three-axis actuator, allowing the punch to move along a first axis X, a second axis Y and a third axis Z; and the probe unit is mounted on the punch actuator. The invention is aimed at simplifying the structure of the device by combining into one unit means for measuring and means for modifying an object. The technical result of the invention consists in increasing measurement resolution.
First Claim
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International Classification(s)
- 2017 Application Filing Year
- G01Q Class
- 117 Applications Filed
- 90 Patents Issued To-Date
- 76.93 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- G01Q Class
- 0 % this patent is cited more than
- 3 Age
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