Specimen preparation apparatus
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United States of America
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Jan 25, 2022
Grant Date -
Jul 26, 2018
app pub date -
Jan 17, 2018
filing date -
Jan 17, 2018
priority date (Note) -
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Abstract
A lower-side structure forms a specimen chamber in which a specimen base is provided. An upper-side structure forms a nozzle chamber above the specimen chamber. The specimen chamber and the nozzle chamber are separated by a gate valve. In the nozzle chamber, at least a tip opening of a nozzle that ejects a specimen is present. A control device maintains a relationship of gas pressures such that a gas pressure in the specimen chamber is higher than a gas pressure in the nozzle chamber when the lower-side structure and the upper-side structure are in communication with each other.
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