Testing device

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11226364
APP PUB NO 20200348356A1
SERIAL NO

16861264

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Importance

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Abstract

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A testing device (100) is for electrically testing integrated circuits on a wafer (102). The testing device (100) includes a vacuum chamber (109), a chuck (101) for holding the wafer (102), a probe card (103) for electrically contacting the integrated circuits, and a radiation shield (107) arranged inside the vacuum chamber (109) and enclosing the chuck (101) and the probe card (103). In the testing device (100), the vacuum chamber (109) is provided with a gate valve (123), the radiation shield (107) is provided with a hatch (122), and the testing device (100) includes a wafer loading assembly (125) for loading the wafer (102) onto the chuck (101) through the gate valve (123) and the hatch (122).

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Patent Owner(s)

Patent OwnerAddress
AFORE OY20810 TURKU
BLUEFORS CRYOGENICS OYARINATIE 10 HELSINKI 00370

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gunnarsson, David Helsinki, FI 4 5
Henttonen, Vesa Turku, FI 5 20
Junes, Aki Turku, FI 2 2
Kuukkala, Ari Turku, FI 4 3
Manninen, Matti Espoo, FI 6 73
Roschier, Leif Vantaa, FI 7 51
Salminen, Timo Turku, FI 5 15

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