Importance

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Abstract

Provided is a method for manufacturing a solid oxide and a device therefor, capable of manufacturing a solid oxide used as an optical material without introducing damaged layers caused by machining, which does not use any polishing agent or abrasive grains including rare earth elements, or does not use any solution, such as hydrogen fluoride, for which handling is difficult and which imposes a heavy environmental burden. In the presence of water 1, a solid oxide in which one or more kinds of elements are bonded through oxygen is used as an object to be manufactured; a catalyst substance, which cuts a backbond between an oxygen element and another element, forming the solid oxide, by dissociation of a water molecule, and adsorbs it, and helps production of a decomposition product by hydrolysis, is used as a machining reference surface (3); the object (5) to be manufactured and the machining reference surface are disposed so that they are brought into contact with each other or they are brought very close to each other in the presence of water; a potential of the machining reference surface is adjusted to a range where neither H₂ nor O₂ is produced; and the object to be manufactured is moved relative to the machining reference surface thereby to remove a decomposition product from the surface of the object to be manufactured.

First Claim