Apparatus of plural charged-particle beams

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United States of America

PATENT NO 11217423
APP PUB NO 20190279842A1
SERIAL NO

16357309

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Abstract

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A multi-beam apparatus for observing a sample with oblique illumination is proposed. In the apparatus, a new source-conversion unit changes a single electron source into a slant virtual multi-source array, a primary projection imaging system projects the array to form plural probe spots on the sample with oblique illumination, and a condenser lens adjusts the currents of the plural probe spots. In the source-conversion unit, the image-forming means not only forms the slant virtual multi-source array, but also compensates the off-axis aberrations of the plurality of probe spots. The apparatus can provide dark-field images and/or bright-field images of the sample.

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ASML NETHERLANDS B VDE RUN 6501 VELDHOVEN NL-5504 DR

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Zhongwei San Jose, US 131 1026
Jau, Jack Los Altos Hills, US 55 721
Li, Shuai Beijing, CN 197 684
Liu, Xuedong San Jose, US 123 844
Ren, Weiming San Jose, US 116 788

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