Printing a chemical mechanical polishing pad

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United States of America

PATENT NO 11207758
APP PUB NO 20210069856A1
SERIAL NO

17102181

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Abstract

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A method of fabricating a polishing layer of a polishing pad includes successively depositing a plurality of layers with a 3D printer, each layer of the plurality of polishing layers deposited by ejecting a pad material precursor from a nozzle and solidifying the pad material precursor to form a solidified pad material.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bajaj, Rajeev Fremont, US 162 3380
Chin, Barry Lee Saratoga, US 10 303
Lee, Terrance Y Oakland, US 23 464

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