Method and apparatus to develop lithographically defined high aspect ratio interconnects
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United States of America
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Dec 21, 2021
Grant Date -
Jul 4, 2019
app pub date -
Dec 28, 2017
filing date -
Dec 28, 2017
priority date (Note) -
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Abstract
An apparatus, comprising at least one vessel having a bottom and at least one sidewall extending from the bottom, wherein the at least one sidewall encloses an interior of the at least one vessel, a shaft has a proximal end and a distal end, wherein the distal end of the shaft extends into the interior of the at least one vessel, wherein the proximal end of the shaft is coupled to a motor, at least one support structure which extends laterally from the shaft; and a substrate attachment fixture on a distal end of the at least one support structure, wherein the at least one support structure and the substrate attachment fixture are within the interior of the at least one vessel.
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