Physical quantity sensor, physical quantity sensor device, complex sensor device, inertial measurement unit, and vehicle
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United States of America
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Dec 21, 2021
Grant Date -
May 30, 2019
app pub date -
Nov 27, 2018
filing date -
Nov 27, 2018
priority date (Note) -
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Abstract
A physical quantity sensor includes a substrate, a support portion fixed to the substrate, a movable body which is displaceable in a first direction with respect to the support portion and has a movable electrode provided therein, and a fixed electrode fixed to the substrate. The fixed electrode includes first and second fixed electrode fingers positioned on one side of the support portion, third and fourth fixed electrode fingers positioned on the other side thereof. The movable electrode includes first to fourth movable electrode fingers which face the first to fourth fixed electrode fingers in the first direction, respectively.
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