Electron emitter and method of fabricating same

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11201032
APP PUB NO 20210142975A1
SERIAL NO

17022504

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Abstract

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Electron emitters and method of fabricating the electron emitters are disclosed. According to certain embodiments, an electron emitter includes a tip with a planar region having a diameter in a range of approximately (0.05-10) micrometers. The electron emitter tip is configured to release field emission electrons. The electron emitter further includes a work-function-lowering material coated on the tip.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Zhongwei San Jose, US 131 1026
Dou, Juying San Jose, US 21 169
Fan, Zheng Beijing, CN 12 16
Kuo, Tzu-Yi Hsinchu, TW 8 3

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