Pressure sensor stacking arrangement, measuring device and method for the production thereof

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United States of America

PATENT NO 11199461
APP PUB NO 20200386643A1
SERIAL NO

16633462

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Abstract

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A pressure sensor system having at least one pressure sensor device. The pressure sensor device has a stack having a ceramic substrate, at least one signal processing element, and at least one sensor element. The pressure sensor device is placed in a sensor housing provided with a membrane, and a residual volume of the sensor housing provided with the membrane is filled with an incompressible fluid. A method for producing such a pressure sensor system, and to a measuring device, are also described.

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Patent Owner(s)

Patent OwnerAddress
ROBERT BOSCH GMBHPOSTFACH 30 02 20 D-70442 STUTTGART

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Amor, Burgos Vicente Gomaringen, DE 1 0
Guffarth, Florian Reutlingen, DE 3 17
Haeussermann, Conrad Trochtelfingen, DE 15 61
Rajaraman, Vijaye Villach, AT 5 8
Sodan, Lars Balingen, DE 12 22

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