Charged particle beam source and a method for assembling a charged particle beam source

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United States of America Patent

PATENT NO 11189451
SERIAL NO

17110167

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Abstract

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A charged particle beam source that may include an emitter that has a tip for emitting charged particles; a socket; electrodes; a filament that is connected to the electrodes and to the emitter; electrodes for providing electrical signals to the filament; a support element that is connected to the emitter; and a support structure that comprises one or more interfaces for contacting only a part of the support element while supporting the support element.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS ISRAEL LTDTHE CITY OF ISRAEL HARVARD REHOVOT CENTRAL DISTRICT

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Asulin, Itay Rehovot, IL 6 0
Avneri, Israel Ramat-Gan, IL 11 162
Eytan, Guy Kidron, IL 18 68
Krivts, (Krayvitz) Igor Rehovot, IL 12 30
Levin, Jacob Rehovot, IL 10 33
Schlimoff, Natan Rehovot, IL 7 13
Shavit, Lavy Rehovot, IL 3 0
Uziel, Yoram Misgav, IL 52 602
Yuli, Ofer Rehovot, IL 4 3

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