Structured grating component, imaging system and manufacturing method

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United States of America Patent

PATENT NO 11189391
SERIAL NO

15734238

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Abstract

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The invention relates to a method of manufacturing a structured grating, a corresponding structured grating component (1) and an imaging system. The method comprising the steps of: providing (110, 120, 130) a catalyst (30) on a substrate (20), the catalyst (20) having a grating pattern; growing (140) nanostructures (50) on the catalyst (30) so as to form walls (52) and trenches (54) based on the grating pattern; and filling (160) the trenches (54) between the walls (52) of nanostructures (50) using an X-ray absorbing material (70). The invention provides an improved method for manufacturing a structured grating and such structured grating component (1), which is particularly suitable for dark-field X-ray imaging or phase-contrast imaging.

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Patent Owner(s)

Patent OwnerAddress
KONINKLIJKE PHILIPS N VHOLLAND IAN DEHO FINN EINDHOVEN NORTH BRABANT

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hermes, Dorothee Endhoven, NL 3 4
Jacobs, Johannes Wilhelmus Maria Bostel, NL 23 41
Liu, Bo Waalre, NL 672 3701
Unnikrishnan, Sandeep Veldhoven, NL 19 51
Vogtmeier, Gereon Aachen, DE 129 1148
Yaroshenko, Andre Garching, DE 2 0

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