Resist composition and method of forming resist pattern

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11187981
APP PUB NO 20190196330A1
SERIAL NO

16220852

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Abstract

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A resist composition including a resin component whose solubility in a developing solution is changed due to an action of an acid, in which the resin composition has a constitutional unit derived from a compound containing a chain-like aliphatic acid dissociable group or a monocyclic aliphatic acid dissociable group and a constitutional unit derived from a compound containing an aromatic hydrocarbon group-containing acid dissociable group.

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Patent Owner(s)

Patent OwnerAddress
TOKYO OHKA KOGYO CO LTD150 NAKAMARUKO NAKAHARA-KU KANAGAWA KAWASAKI-SHI 211-0012

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hori, Yoichi Kawasaki, JP 42 179
Kojima, Takahiro Kawasaki, JP 81 179
Yahagi, Masahito Kawasaki, JP 31 109
Yamano, Hitoshi Kawasaki, JP 18 57
Yoshii, Yasuhiro Kawasaki, JP 25 179

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